1) SALD is in the air: impact on open-air Spatial Atomic Layer Deposition on thin film processing and materials properties
Dr. David Muñoz-Rojas
Laboratoire des Matériaux et du Génie Physique (LMGP), Université Grenoble Alpes – CNRS, F-38000, Grenoble, France
Email : david.munoz-rojas@grenoble-inp.fr
Abstract: Spatial Atomic Layer Deposition (SALD) is a recent variant of ALD that offers fast processing, even at atmospheric pressure, while preserving the unique assets of ALD, namely, precise thickness control down to the nanometer, high-quality films even at low temperatures, and unique conformality. As a result, SALD is ideal for applications requiring high throughput at low cost, such as new generation photovoltaics, LEDs or packaging. In particular, the SALD approach based on close-proximity deposition heads is highly versatile since it can be easily customized by proper design of the deposition heads and because the deposition takes place in the open air without the need of any deposition chamber.
But there is more to SALD than a faster and scalable version of SALD. In particular, I will illustrate how 3D printing can be used to prototype and customize close-proximity deposition heads, and how in so doing SALD can indeed be tuned to deposit custom patterns, coat tubular membranes or achieve combinatorial depositions. I will also discuss our results showing the effect of open-air processing on the properties of the thin films deposited with our close-proximity system, and how the choice of precursor can have a huge impact on the final properties of the materials deposited. The potential of SALD will be illustrated through different examples of applications of the thin films developed in our group.
BIO: Dr. David Muñoz-Rojas received his degree in organic chemistry in 1999 and master’s degree in chemical engineering (2000) from the Instituto Químico de Sarrià (IQS, Barcelona, Spain), obtaining the P. Salvador Gil, S.I. 2000 prize. He did his PhD in materials science (2004) at the Instituto de Ciencia de Materiales de Barcelona (CSIC-UAB). Thereafter, he worked as a postdoc at the Laboratoire de Réactivité et Chimie des Solides in Amiens (France), the Research Centre for Nanoscience and Nanotechnology in Barcelona, and the University of Cambridge (Device Materials Group, UK). Dr. Muñoz-Rojas is currently CNRS research director at the Laboratoire des Matériaux et du Génie Physique in Grenoble, France. His research focuses on using and developing cheap and scalable chemical approaches for the fabrication of novel functional materials for electronic and optoelectronic applications. In particular, he has pioneered the development of the novel spatial atomic layer deposition (SALD) technique for the deposition of active components for optoelectronic devices. He is currently further developing SALD to extend the possibilities and fields of application of this exciting technique. He has published 115 papers, and several book chapters and is co-inventor of 7 patents.
sites.google.com/site/workdmr
2) Unveiling the Potential of Transparent Conductive Materials: From Process Synthesis to Functionalization
Laboratoire de Génie Chimique, Université de Toulouse, CNRS, INPT, Toulouse, 31432 France
Inorganic Chemistry Laboratory, Department of Chemistry, University of Oxford, South Parks Road, Oxford OX1 3QR, UK
E-mail: abderrahime.sekkat@toulouse-inp.fr ; abderrahime.sekkat@chem.ox.ac.uk
Abstract: Transparent conductive material (TCM) layers are key components in various functional devices, including optoelectronics, transparent heaters, and flexible electronics. In recent years, a wide range of TCMs has been reported in the literature, including metal oxides, metal nanowire networks, and conductive polymeric thin films. These TCMs exhibit attractive physical (both electronic and optical) and structural (mechanical and morphological) properties. Depending on the fabrication process, TCMs can be produced by chemical-based methods such as convention and spatial atomic layer deposition (ALD/SALD) and chemical vapor deposition (CVD), as well as physical-based methods like sputtering and evaporation. Despite their advantages, TCMs face several challenges, including rapid degradation and limited tunability for specific applications. To address these issues, extensive research has been conducted to enhance their intrinsic performance and stability over time. This presentation will discuss recent work on nanocomposite-based silver nanowires (AgNWs) and metal oxides using SALD, along with prospective developments in conductive polymer thin films by CVD, and examples of their integration into functional devices..
BIO: Abderrahime Sekkat is an Associate Professor of Materials Science and chemistry at the National Polytechnic Institute of Toulouse (INPT). He currently serves as the International Coordinator for the Chemical Engineering Department at the university (since 2022). He holds a Ph.D. in Materials Science from Grenoble Alpes University (UGA), where he conducted research within the LMGP, IMEP-LAHC, and SIMAP laboratories. Following his doctoral studies, he completed a postdoctoral position at LMGP-Phelma, focusing on energy-related projects. Dr. Sekkat has received several awards, including the Ph.D. thesis award from the Solid-State Chemistry Division of the French Chemical Society and a research prize from Grenoble Alpes University. His research primarily focuses on the development of functional materials for energy-efficient technologies, as well as optoelectronic and electronic applications. Recently, his work has expanded to include the development of transparent conductive materials, ranging from metal oxides to metal nanowire networks and polymer thin films, based on vapor phase and physical deposition methods. He is currently a Visiting Research Fellow at Oxford University, supported by the St John’s College scheme.
